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QD9 제품 이미지
TOP RING
Etch Process

Top Ring is one of the critical parts for the Etching Process in the chamber to uniformly distribute the plasma onto the wafers.

QD9 제품 이미지
BOTTOM RING
Etch Process

Bottom Ring is used to protect the lower portion of the ESC.

QD9 제품 이미지
SINGLE RING
Etch Process

Single Ring is to assist in applying the plasma uniformly onto the wafer.

QD9 제품 이미지
BAFFLE
CVD Process

During the CVD Process, Baffle inside the Dome will control the flow of gas and etched residues.

QD9 제품 이미지
NAT GATE SHIELD
CVD Process

NAT Gate Shield is used to protect the plasma inside of the chamber to have best process environment.