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RAW MATERIALS

Material Supplier Model Product
Quartz Tosoh N Chamber wall, Pumping Liner
Momentive GE Cover Ring, A7 Ring, Shield Ring
Silicon “L”Company
(Local)
8″/12″Ingot Si focus Ring, Electrode
Ceramic Sumitomo Chem. AES-11 End Effector, Bottom Plate Lift pin, Window Plate, Main Insulator
Sapphire 'A' company(Overseas)
'A' company(Local)
Kyropoulos' method Window,Pin,Port
SiC 'A' company(Overseas)
'A' company(Local)
Pressureless/
Reactive sintering
SiC plate, Edge Ring, DC Plug

SILICON MATERIALS

1. Information

Material Supplier Model
Single Silicon L社 BC & C

2. Material Spec

Impurity Contents Analysis Method
Na(Sodium) < 0.1PPM Atomic Absorption Analysis
K(Potassium) < 0.1PPM
Fe(Iron) < 0.1PPM
Al(Aluminum) < 0.1PPM
Cu(Cooper) < 0.1PPM
Cr(Chromium) < 0.1PPM

3. Impurity Contentents

Item Purity Type Dopant Resistance
Single Silicon 6N↑ P Type Boron 1~5Ω

CERAMIC MATERIALS

1. Ceramic(Al2O3) Powder

ID Item Contents Remark
1 Powder Al2O3(99.7%)
2 Supplier Sumitomo (Japan)

2. Ceramic(Al2O3) Powder Material Component

ID Contents % ID Contents %
1 Al2O3 99.7 4 Na2O3 0.045
2 MgO 0.095 5 Fe2O3 0.01
3 SiO2 0.05 6 Others 0.1

3. Ceramic(Al2O3) Physical Properties

ID Impurity Contents Remark
1 Material Al2O3 -
2 Density 3.96X103 Kg/m3
3 Hardness 1500 Kg/m3
4 Dielectric Constant 9.9 1MHz
5 Thermal Conductivity 20℃ 32 W/m.K
6 Heat Shock Resistivity 250 T.℃
7 Average powder grain size 0.2~0.4㎛ Diameter
8 Maximum Using Temperature 1700 -